Charged particle beam apparatus

ABSTRACT

A charged particle beam apparatus is provided which has high resolving power and a wide scanning region (observation field of view). The apparatus has a unit for adjusting the focus, a unit for adjusting astigmatism, a unit for controlling and detecting scanning positions and a controller operative to control the focus adjustment and astigmatism adjustment at a time in interlocked relation to the scanning positions, thereby assuring compatibility between the high resolving power and the observation view field of a wide area.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is relevant to U.S. patent application Ser. No.______ being filed by Mari Nozoe, Yasunori Goto and Chouki Tei, based onJapanese Patent Application No. 2004-377778 filed on Dec. 27, 2004, theentire content of which is incorporated herein by reference.

BACKGROUND OF THE INVENTION

The present invention relates to a charged particle beam apparatus forperforming highly accurate inspection, measurement and working by usinga charged particle beam.

Available as a charged particle beam apparatus are a scanning electronmicroscope (hereinafter referred to as SEM) and an electron microscopefor length measurement, simply, a measuring electron microscope(hereinafter referred to as CD-SEM) representing one of apparatus forinspection of semiconductor specimens. In addition, as described inJP-A-11-51886, an inspection apparatus is available which uses imagecomparison to thoroughly inspect the overall region to find where adefect exists on a wafer. There are a variety of inspection targetobjects involved in the inspection apparatus, including not onlydefective shapes in patterns but also conduction/non-conduction defectsand deposition of foreign matters.

Desirability of customers for need for an image of higher resolvingpower and minute or fine formation of a semiconductor pattern prevails,followed by advancement of high resolution powering of theaforementioned apparatus, and there results a tendency to shorten thedistance between an objective lens and a specimen. In other words, forthe sake of high resolution powering, the focal point of the objectivelens becomes shorter to ensure that a charged particle beam can bereduced in aberration and an image of high resolving power can beacquired. In the SEM, however, a field of view is searched with anobserved image of a wide region (low magnification image) and hencethere arises a problem that an image at a magnification suitable forview field search cannot be obtained. In the inspection apparatus, theabove situation also gives rise to a causative factor of prevention ofimprovements in inspection speed. As described in the aforementionedJP-A-11-51886, with the aim of improving the throughput, a method isemployed according to which a specimen stage is continuously moved whilescanning an electron beam to acquire an image but with more improvementsin throughput desired, it is necessarily inevitable to adopt a method ofinspecting a wide region at once. But because of the shortened focalpoint, a problem is encountered in which when a wide region isscanned/irradiated with a charged particle beam, blur and distortion arecaused at the peripheral portion. Therefore, the region of an imagesuitable for inspection is limited to that devoid of blur and distortionand the high resolution powering causes a reduction in throughput toincur.

In case an image is formed by an information signal and a line width ofa pattern is measured or in the case of a comparative inspection fordetecting a defect by comparing pattern images, the quality of anobtained image has the great influence upon the reliability ofinspection results. Since the quality of an image is deteriorated owingto aberration of an electron optical system and to degraded imageresolution caused by blur, the sensitivity of inspection of defects andthe performance of measurement are degraded in the case of an imagehaving blur and distortion at the peripheral portion underscanning/irradiation of a wide region. JP-A-10-318950 describes a methodof assuring a view field of a wide region by detecting a positionalshift through correction of the distortion to form an image devoid ofdistortion.

Usually, adjustment of focus and astigmatism is made while watching animage formed by an information signal but mostly, watching is directedto only the central portion of a region scanned with a charged particlebeam. Exaggeratedly illustrated in FIG. 2 is the behavior of a chargedparticle beam near the surface of a specimen. The charged particle beam,as designated at 36, scans the specimen surface while tracing an arcuatelocus like a pendulum about the center lying at an intersection 44 wherean optical axis 43 crosses orthogonally a specimen 13 and actually, asthe charged particle beam proceeds by width r, the height changes by has shown in FIG. 2. The change h in height results in a shift of focalposition of the charged particle beam, leading to an image fieldcurvature aberration on the specimen responsible for blur, as shown atdotted line. Further, as the charged particle beam deviates from theoptical axis, an astigmatic aberration also takes place. JP-A-2001-68048discloses a method for automatic adjustment of astigmatism. And also, inscanning a wide region, the magnetic field and electric field of adeflector becomes irregular towards the peripheral portion anddistortion takes place. The shorter the focus of the objective lens, themore the distortion becomes noticeable, indicating that as the highresolution powering advances, the limit of the scanning region tends tobe narrowed. Conventionally, the scanning region is limited to a rangewithin which any blur and distortion do not take place or they arepermissible, thereby defining a maximum observation view field or amaximum inspection region.

SUMMARY OF THE INVENTION

As exemplified in FIG. 3, a scanning range of a charged particle beamsuitable for search of the view field or a scanning range determinedfrom the standpoint of throughput is assumed to be as a scanning region210. Then, it is presupposed that focus and astigmatism are adjusted ata central area 201 and an area, in which the picture quality issubstantially the same as that in the central area, that is, no blurexists or blur is permissible, is defined as area 211. This area 211tends to be narrowed proportionately to shortening of the focus of theobjective lens aiming at high resolution powering, giving rise to aproblem that search of a field of view is difficult to achieve for alarge specimen in the SEM and in the case of an inspection apparatus,the area usable for inspecting objects at a time is narrowed to degradethe throughput. Especially, when an inspection is conducted in afabrication process of a semiconductor wafer and the like, a degradationof throughput is fatally unprofitable.

A first object of the present invention is to provide a charged particlebeam apparatus having high resolving power and a wide scanning region(observation field of view).

A second object of the present invention is to provide a chargedparticle beam apparatus capable of speeding up inspection using acharged particle beam.

To accomplish the above objects, a charged particle beam apparatusaccording to this invention comprises means for adjusting focus, meansfor adjusting astigmatism, means for controlling/detecting a scanningposition and means for simultaneously controlling the focus adjustmentand the astigmatism adjustment in interlocked relation to the scanningposition. The means as above can make the high resolution poweringcompatible with the assurance of the observation view field of a wideregion, so that an image at a magnification suitable for search of theview field can be obtained and besides, the throughput can be improvedin an inspection apparatus using a charged particle beam.

According to the present invention, a charged particle beam apparatusmeeting high resolving power and wide scanning region (observation viewfield) can be realized and speedup of inspection can be achieved in aninspection apparatus using a charged particle beam.

Other objects, features and advantages of the invention will becomeapparent from the following description of the embodiments of theinvention taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic construction diagram showing an example of acharged particle beam apparatus according to the present invention.

FIG. 2 is a diagram showing a locus of a charged particle beam near aspecimen.

FIG. 3 is a diagram useful to explain a scanning region.

FIG. 4 is a diagram showing an example of structure when a deflector anda stigmator are of the electromagnetic type.

FIG. 5 is a diagram showing an example of a stigmator electrode.

FIG. 6 is a diagram showing an example of a stigmator coil.

FIG. 7 is a diagram showing an example of structure of the stigmatorcoil and stigmator electrode used in combination.

FIG. 8 is a diagram showing an example of structure of an objectivelens.

FIG. 9 is a diagram for explaining distortion inside a field of view.

FIG. 10 is a flowchart showing the procedure of focus/astigmatismadjustment.

FIG. 11 is a diagram for explaining scanning areas.

FIG. 12 is a three-dimensional graphical representation showing therelation between scanning width and correction amount.

FIG. 13 is a diagram showing an angle a charged particle beam makes tothe optical axis.

FIG. 14 is a diagram showing an example of a screen display unit.

FIG. 15 is a diagram showing an example of schematic construction of aninspection apparatus using an electron beam.

FIG. 16 is a diagram showing an example of structure of an objectivelens.

FIG. 17 is a diagram showing an example of a deflector and a stigmatorelectrode of the electrostatic type used in combination.

FIG. 18 is a diagram showing an example where a deflector includes thesame type of electrode as a stigmator of the electrostatic type.

DESCRIPTION OF THE EMBODIMENTS

The present invention will now be described in greater detail by way ofembodiments thereof.

Referring first to FIG. 1, an example of construction of a chargedparticle beam apparatus according to the present invention isschematically illustrated. A charged particle gun 1 is comprised of acharged particle source 2, an extracting electrode 3 and an acceleratingelectrode 4. Extraction voltage V1 is applied across the chargedparticle source 2 and the extracting electrode 3 to thereby extract aprimary charged particle beam 36 from the charged particle source 2. Theaccelerating electrode 4 is maintained at earth potential andaccelerating voltage V0 is applied across the accelerating electrode 4and the charged particle source 2. Accordingly, the primary chargedparticle beam 36 is accelerated by the accelerating voltage V0. Theaccelerated primary charged particle beam 36 is removed of anunnecessary region by means of an aperture 15, condensed by a condenserlens 7 connected to a lens control power supply 5 so as to be formedinto a crossover 10 and then further condensed by a condenser lens 8.Thereafter, the beam is focused on a specimen 13 such as a semiconductorwafer on a specimen stage 12 by an objective lens 9. The specimen stage12 is movable at least horizontally by means of a stage drive unit 23.The specimen 13 is irradiated with the focused primary charged particlebeam 36 while the primary charged particle beam 36 being corrected forits astigmatism by means of a stigmator 40 adapted to correct astigmaticaberration and scanned by means of a deflector generally designated at16 and having elements 16 a and 16 b connected to a scanning signalgenerator 24. In this phase, the stigmator 40 is controlled with astigmator controller 45. When the deflector 16 and the stigmator 40 areof the electromagnetic type, they are structured as exemplified in FIG.4. An information signal 33 generated from the specimen 13 underirradiation of the primary charged particle beam 36 is detected with asignal detector 21. The detected signal is converted into a brilliancemodulation signal for an image display unit 32 such as a CRT so that amagnified image of the specimen may be displayed on the image displayunit 32. Although not illustrated, the components put together as aboveare housed in a vacuum container suitable for illumination of thecharged particle beam.

Focus and astigmatism are corrected on real time base in interlockedrelation to scanning positions of the primary charged particle beam 36.The scanning position of the primary charged particle beam 36 iscontrolled with the scanning signal generator 24 and then a change infocus is corrected by the objective lens 9 and an astigmatic aberrationis adjusted by the stigmator 40 in relation to a scanning position.

In this case, the stigmator 40 can be constructed of a stigmatorelectrode 53 of plural segments for generating an electric field asshown in FIG. 5 or of a stigmator coil 54 of plural segments forgenerating a magnetic field as shown in FIG. 6. When the stigmator 40 iscontrolled in interlocked relation to the scanning position, thestigmator electrode 53 of FIG. 5 may preferably be used if the responserate or speed is taken into consideration. But control of the electrodeis based on voltage control and a circuit to this end is difficult toconstruct. In comparison therewith, the stigmator coil 54 of FIG. 6 isinferior to the electrode type from the standpoint of the response ratebut is meritorious in that it can be controlled easily with currentvalues. In addition, because of the simplified structure of coilsegments, the coil type can be made up more cheaply than the electrodetype structure. For example, these types can be used properly such thatthe stigmator coil 54 is used for adjustment of astigmatism during usualimage observation whereas the stigmator electrode 53 is used when anadjustment is made in interlocked relation to a scanning position. Anexample of structure for this purpose is illustrated in FIG. 7.

The objective lens 9 can be formed of an electromagnetic objective lensfor generating a magnetic field or an electrostatic objective lens forgenerating an electric field. Likewise, each of the condenser lenses 7and 8 can be constructed of a magnetic lens or an electrostatic lens.Furthermore, in case the objective lens 9 is, for example, anelectromagnetic objective lens, a second coil 42 for focus correctionmay also be provided separately as shown in FIG. 8. For example, a firstcoil 41 serving as a main part is set with an exciting current obtainedwhen an adjustment is made at the optical axis center position 44 andthe second coil 42 is used to correct changes in focus.

And also, at the peripheral portion of a scanning region, the magneticfield or electric field of the deflector 16 becomes irregular and adistortion takes place. An example of the distortion is shown in FIG. 9.For example, when a mesh-like object is observed, a distortion takesplace at the peripheral portion of a scanning region 210 and positionalshifts result. Where the original mesh position is indicated by dottedline, a point 301 a is shifted by a distance r to a point 301 b. Thisdistance is calculated to control the deflector 16 such that the shiftedpoint can recover the original position. In a method for calculation ofdistance, for example, the movement of specimen stage 12 is controlledsuch that the specimen 13 can be moved by distance (x1, y1).Subsequently, the deflection position is shifted by distance (x1, y1) bymeans of the deflector 16. Since the movement of deflection position iseffected by the same distance as that of the movement of specimen stage12, no apparent movement is caused in the absence of distortion. But, ineffect, the field of view cannot remain unchanged because a scanningarea associated with the point 301 a shifts to the point 301 b. Thisinequality is corrected by controlling the scanning position thedeflector 16 provides. Correction of the scanning distortion can be madethrough the use of a method as described in, for example, theaforementioned JP-A-10-318950. The control amount of the deflectornecessary for scanning distortion correction is measured in advance andstored in a storage means while bearing relation to the deflectionposition or deflection angle.

The adjustment may also be made by deflecting only the charged particlebeam 36 without resort to movement of the specimen stage 12. With agrid-shaped specimen used, the amount of distortion can be calculatedwithout moving the specimen stage 12 and time to calculate thedistortion amount can be reduced by a time to move the specimen stage12.

Turning now to FIG. 10, there is illustrated a flowchart showing theprocedure for making adjustment of focus and astigmatism in interlockedrelation to the scanning position.

For example, a scanning region 210 is defined as shown in FIG. 11 andthen positions of 8 target points, for instance, are set distantly froma central area inside the scanning region 210, thus providing scanningareas 202 to 209. Focus and astigmatism are adjusted at the central area201 in step 101 and adjusted values of focus and astigmatism arerespectively stored (step 102). In step 103, adjustment of focus andastigmatism is made at each of the scanning areas 202 to 209 andadjusted values of focus and astigmatism for the individual areas arestored (step 104). Assuming that the adjusted values of focus andastigmatism at the central scanning area 201 are 0 (zero), amounts offocus correction when adjustment is made inside, for example, a 100μm×100 μm field of view are given as illustrated in FIG. 12. Thecorrection value increases toward the edge of the scanning region as thescanning region spreads, indicating that the amount of image fieldcurvature aberration to be corrected increases. These adjustment valuesare stored in, for example, a memory provided in the controller 31.

In step 105, values of correction to be executed on real time base arederived from the stored adjusted values. Practically, adjusted values offocus and astigmatism at all of the scanning areas are replaced with afunction of scanning position (X,Y) of the primary charged particle beam36 and therefore, a functional expression is derived. At the time thatthe scanning position of primary charged particle beam 36 is controlledby the scanning signal generator 24 such that the beam is at a scanningposition (X1, Y1), correction values of focus and astigmatism at thatposition are set. As a consequence, focus and astigmatism can beadjusted at all the areas inside the scanning region 210 and blur andastigmatism can be eliminated. As the function to be derived for thispurpose, a linear function, a quadratic function or a cubic function canbe used. When considering asymmetry, a quadratic or higher function maypreferably be used. For example, where a correction functionalexpression is a function of position (X,Y), a correction function F(X,Y)is as follows:F(X,Y)=aX ² +bY ² +cX+dY+ePwhere a to e are coefficients.

In making adjustment at the scanning areas 202 to 209, adjustment can becarried out by noticing narrow areas of the individual scanning areas202-209 of scanning region while scanning the whole of the scanningregion 210 by means of the deflector 16 but for improving the accuracyof adjustment, a method may also be employed, according to which anadjustment is conducted at high magnification at the scanning area 201in the center of the scanning region 210 and thereafter, adjustment isconducted at the peripheral scanning areas 202 to 209 by performingscanning and irradiation at magnifications suitable for these areas.

In deriving the functional expression, if the adjustment is made withthe region 210 in FIG. 11 divided into about 5×5=25 points though notillustrated, the correction functional expression can approach moreclosely to practicability and the accuracy of adjustment can beimproved. The wider the region 210, the finer the division of the regioninto areas for adjustment needs to be. At that time, by deflecting thecharged particle beam 36 at positions of the individual scanning areasand at the same time by moving the specimen stage 12 by a distance equalto an amount of movement of charged particle beam 36 to each scanningarea, adjustment of focus and astigmatism can be made for a just hitobject on the specimen. But, in the case of a specimen liable to beelectrified, the amount of electrified charge changes with the dosage ofthe charged particle beam and therefore, adjusted values at,particularly, the latter half of scanning areas differ from properadjustment values. In such an event, it is recommended that adjustmentbe carried out by not moving the specimen stage but moving only thecharged particle beam.

According to an exemplified adjustment method, adjustment carried out atthe scanning area 201 in the step 101 is such that the focus is adjustedby means of the coil 41 inside the objective lens 9 and the astigmatismis corrected by means of the stigmator 40; and subsequently, in the step103, the focus is adjusted by means of the coil 42 for correction insidethe objective lens 9 and the astigmatism is corrected by means of thestigmator 40.

In the aforementioned adjustment method, adjustment is made inaccordance with the scanning position of primary charged particle beam36 determined by the deflector 16 but as shown in FIG. 13, control canalso be done in accordance with an angle θ the primary charged particlebeam 36 makes to the center. In this case, the correction functionalexpression is a function of deflection angle (θ) and a correctionfunction F(θ) can be expressed by the following equation:F(θ)=a′θ ² +b′θ+c′where a′to c′ are coefficients.

The aforementioned adjustment may be conducted manually by an adjusterwhile giving a display on the image display unit 32 but it may be doneautomatically by means of an image processor 37. In the case of manualadjustment by the adjuster, an image 47 of the specimen is displayed onthe image display unit 32 and focus and astigmatism are adjusted whilewatching the image. Designation as to at which area of the scanningregion the adjustment is to be conducted is given by an adjustmentposition designation button 48. To facilitate distinctive recognition asto which position of the adjustment position designation button 48 anactually adjusted image corresponds to, a method for display of theadjustment position designation button 48 can preferably be changed by,for example, changing color or applying masking as shown at an area 55in FIG. 14. Further, by changing a method for display of the adjustmentposition designation button indicative of a position at which adjustmentends in a similar way, distinction from an unadjusted position can befacilitated. Exemplarily, a method for changed display is indicated atan area 56 in FIG. 14.

For confirmation of adjusted values, they can also be displayed on theimage display unit 32 by using an adjusted value confirmation table 49.Concurrently therewith, the derived functional expression andcoefficients can also be displayed. In case a series of adjustment stepsare conducted automatically by means of the image processor 37, it isalso possible for the user to confirm the status of adjustment bydisplaying the adjusted value confirmation table 49. Adjusted values andcoefficients of the correction functional expression as shown in FIG. 12can also be displayed diagrammatically at a display area 50. Besides,the correction functional expression per se can also displayed at thedisplay area 50.

Referring to FIG. 15, an example of an inspection apparatus using anelectron beam according to the present invention is constructed asschematically illustrated therein. An electron gun 1 is comprised of anelectron source 2, an extracting electrode 3 and an acceleratingelectrode 4. Extraction voltage V1 is applied across the electron source2 and the extracting electrode 3 to thereby extract a primary electronbeam 36 from the electron source 2. The accelerating electrode 4 ismaintained at earth potential and accelerating voltage V0 is appliedacross the accelerating electrode 4 and the electron source 2.Accordingly, the primary electron beam 36 is accelerated with theaccelerating voltage V0. The accelerated primary electron beam 36 isremoved of an unnecessary region by means of an aperture 15, condensedby a condenser lens 7 connected to a lens control power supply 5 so asto be formed into a crossover 10 and further condensed by a condenserlens 8. Then, the condensed primary electron beam is focused by anobjective lens 9 on a specimen 13 such as a semiconductor wafer held ona specimen stage 12. The specimen stage 12 is movable at least in thehorizontal direction by means of a stage drive unit 23 and a measurementunit for position monitoring 11. Designated by reference numeral 17 is ablanking deflector controlled by a scanning signal generator 18.

The specimen 13 is irradiated with the focused primary electron beam 36.The primary electron beam 36 is corrected for its astigmatic aberrationwith a stigmator 40 adapted to correct the astigmatism by applying anelectric field or a magnetic field and is scanned by a deflectorgenerally designated at 16 and having elements 16 a and 16 b connectedto a scanning signal generator 24. The scanning position of primaryelectron beam 36 is controlled with the scanning signal generator 24.Disposed more closely to the specimen 13 than to the objective lens 9 isan electrode 6 for controlling electricity charging potential on thespecimen 13. As a retarding voltage for decelerating the primaryelectron beam 36, a negative voltage is applied to the specimen 13 bymeans of a variable deceleration power supply 14. The retarding voltagecan be changed arbitrarily by adjusting the variable deceleration powersupply 14. Although not illustrated, the above components are housed ina vacuum container suitable for illumination of the electron beam.

The height of the specimen 13 is measured on real time base by means ofa specimen height measuring unit 22 and measurement results are fed backfrom a controller 31 to the lens control power supply 5 so that thefocus of objective lens 9 may be corrected dynamically. In addition, theirradiation position of the primary electron beam 36 is detected withthe position monitoring measurement unit 11 and measurement results arefed back from the controller 31 to the scanning signal generator 24 sothat the irradiation position of primary electron beam 36 may becontrolled.

When the focused primary electron beam 36 irradiates the specimen 13while being scanned by means of the deflector elements 16 a and 16 b, aninformation signal 33 indicative of secondary electrons and reflectedelectrons is generated from the specimen 13. The retarding voltageaffecting the primary electron beam 36 irradiating the specimen 13 actsas an accelerating voltage applied to the generated information signal33, thereby ensuring that the information signal 33 can be transportedto above the objective lens 9 (on the side of the electron gun).Disposed above the objective lens is an orthogonal electromagnetic fieldgenerator 20 for generating orthogonal electromagnetic fields andintensities of electric field and magnetic field of the respectiveelectromagnetic fields are controlled such that the deflection effectsacting on the primary electron beam 36 can be cancelled with each otherwhereas the deflection effect can be applied on the information signal33 transported to above the objective lens 9 in such a way that theinformation signal can be directed directly to a detector 21 or can beimpinged or irradiated on a conversion electrode 19. The electrode 19 isformed of a material from which secondary information signal electronsare generated under the impingement of the information signal 33 inaccordance with the amounts of impinged signal electrons, though notillustrated. The secondary information electrons generated from theelectrode 19 are also detected by the detector 21 and converted into anelectric signal.

The electric signal indicative of the information signal 33 detected bythe detector 21 is amplified with an amplifier circuit 25 and digitizedby an A/D converter 26. The digitized signal is stored as an imagesignal in memories 27 and 28 of image processor 37. Specifically, animage signal indicative of an information signal 33 of a firstinspection area is stored in the memory 27. Subsequently, an imagesignal indicative of an information signal 33 of a second inspectionarea, adjoining the first inspection area, of the same circuit patternis stored in the memory 28 concurrently with comparison with thesecondary electron image signal of the first inspection area in thememory 27. Further, an image signal indicative of an information signal33 of a third inspection area is overwritten on the memory 27 and at thesame time, compared with that of the second inspection area stored inthe memory 28. By repeating these operations, storage and comparison ofimage signals of all inspection areas are executed. It is to be notedthat the image signals stored in the memories 27 and 28 can be displayedon a monitor or image display unit 32.

Image comparison is conducted in an operation unit 29 and a defectdecider 30. More specifically, in respect of the image signalsindicative of the information signals 33 stored in the memories 27 and28, various statistics specified by such statistics as mean value andvariance of image density values, values of difference among peripheralpixels, [Rangless statistics value] and [“kyohki” matrix] arecalculated. After execution of these processes has been completed, imagesignals applied with the processes are transferred to the defect decider30 and compared with one another to extract difference signals so thatthey may be separated into defect signals and other signals byconsulting a defect decision condition which has already been determinedand stored.

Further, an image signal indicative of an information signal 33 of aninspection area of a standardized circuit pattern may be stored in thememory 27 in advance and an image signal indicative of an informationsignal 33 of an inspection area of a circuit pattern of the specimen 13may be stored in the memory 28 concurrently with comparison with theimage signal stored in the memory 27.

In the construction as above, individual ones of the adjusted values offocus and astigmatism can be replaced with a function of scanningposition (X,Y) of the beam in accordance the flowchart of FIG. 10 andthe scanning region division diagram of FIG. 11. When the scanningposition of the primary electron beam 36 is controlled or the beam is ata scanning position (X1,Y1) under the control of the scanning signalgenerator 24, correction values of focus and astigmatism at thatposition can be set on the basis of the functional expression.Accordingly, the focus and astigmatism can be adjusted at all areasinside the scanning region 210 and blur and astigmatism can beeliminated.

In order to improve the throughput as in the case of the inspectionapparatus, a method is available in which the primary electron beam 36is scanned at a high speed. In this case, the deflector may be of theelectrostatic type for performing control by applying voltage to theelectrode in consideration of its response rate. Since in this case thefocus and astigmatism are adjusted on real time base in interlockedrelation to the scanning position while scanning the primary electronbeam 36 by means of the deflector elements 16 a and 16 b controlled bythe scanning signal generator 24, a mechanism for correction of thefocus may preferably have, from the standpoint of the response rate, astructure as shown in FIG. 16 in which an objective lens 9 comprised ofa coil 41 is used in combination with a focus correction electrode 46.For example, in the flowchart for adjustment shown in FIG. 10, theexciting current of the coil 41 inside the objective lens 9 iscontrolled for focus adjustment and the stigmator 40 is used foradjustment of astigmatism at the central area 201 in the step 101. Next,in the step 103, the electrostatic type stigmator electrode as shown inFIG. 5 may preferably be used for adjustment in consideration of theresponse rate. In the adjustment of focal position, the coil 41, asprovided in the FIG. 16 structure, is used for adjustment at the centralarea 201 in the step 101 and the focus correction electrode 46 is usedin the step 103.

Referring to FIG. 17, the deflector 16 is combined with theelectrostatic type stigmator electrode 53 as exemplified therein. Incase the deflector 16 is of the electrostatic type so as to bestructured similarly to the stigmator electrode 53, respective controlvoltages may be superimposed on each other to perform control as shownin FIG. 18. In the example of FIG. 18, the deflector 16 has two stagesbut the control voltage for astigmatism correction may be superimposedon either the element 16 a or 16 b. The control voltage for astigmatismcorrection may be superimposed on each of the elements 16 a and 16 b torealize proper use. Further, as shown in FIG. 18, a stigmator coil 54other than that for control on real time base may be provided for thesake of control.

Operation commands and condition setting are applied to the aboveindividual components of inspection apparatus by means of the controller31. Accordingly, such conditions as accelerating voltage, deflectionwidth (scanning width) and deflection speed (scanning speed) of theelectron beam, moving speed of the specimen stage and timing for thedetector to fetch output signals are inputted in advance to thecontroller 31.

It should be further understood by those skilled in the art thatalthough the foregoing description has been made on embodiments of theinvention, the invention is not limited thereto and various changes andmodifications may be made without departing from the spirit of theinvention and the scope of the appended claims.

1. A charged particle beam apparatus comprising: a charged particle beamsource; a lens system including an objective lens for focusing a chargedparticle beam emitted from said charged particle beam source on aspecimen; deflection control means for scanning the charged particlebeam on the specimen; focus adjustment means for adjusting a focalposition of the charged particle beam by controlling said objectivelens; astigmatism adjustment means for adjusting astigmatism of thecharged particle beam; memory means for storing the relation among adeflection position or deflection angle of the charged particle beam bysaid deflection control means, a focus adjustment value by said focusadjustment means and an astigmatism adjustment value by said astigmatismadjustment means; and a controller for controlling said deflectioncontrol means, focus adjustment means and astigmatism adjustment means,wherein said controller operates in interlocked relation to thedeflection position or deflection angle of said charged particle beam bysaid deflection control means to control said focus control means suchthat said charged particle beam is focused on said specimen inaccordance with the relation stored in said memory means and to causesaid astigmatism adjustment means to correct said charged particle beamfor an astigmatic aberration.
 2. A charged particle beam apparatusaccording to claim 1, wherein said focus adjustment means controls anelectrostatic lens.
 3. A charged particle beam apparatus according toclaim 1, wherein said focus adjustment means controls an electromagneticlens.
 4. A charged particle beam apparatus according to claim 1, whereinsaid astigmatism adjustment means controls an electrostatic typestigmator.
 5. A charged particle beam apparatus according to claim 1,wherein said astigmatism adjustment means controls an electromagnetictype stigmator.
 6. A charged particle beam apparatus according to claim3, wherein said objective lens includes a first coil as a main part anda second coil for focus correction and said focus adjustment meanscontrols said second coil.
 7. A charged particle beam apparatusaccording to claim 1, wherein said objective lens includes anelectromagnetic lens and a focus correction electrode and said focusadjustment means controls said focus correction electrode.
 8. A chargedparticle beam apparatus according to claim 1 further comprisingelectromagnetic type deflection means, wherein said deflection controlmeans controls the value of a current passed through saidelectromagnetic type deflection means.
 9. A charged particle beamapparatus according to claim 1 further comprising electrostatic typedeflection means, wherein said deflection control means controls thevalue of a voltage applied to said electrostatic type deflection means.10. A charged particle beams apparatus according to claim 9, wherein avoltage value for astigmatism adjustment by said astigmatism adjustmentcontrol means is applied to said electrostatic type deflection means ina superimposed fashion.
 11. A charged particle beam apparatus accordingto claim 1, wherein said deflection control means corrects a scandistortion occurring at a peripheral portion of a scanning region inaccordance with the relation between a deflection position or deflectionangle stored in said memory means and an amount of control by saiddeflector.
 12. A charged particle beam apparatus according to claim 1further comprising a detector for detecting a signal generated from thespecimen under irradiation of said charged particle beam and displaymeans for displaying a specimen image by using an output of saiddetector.
 13. A charged particle beam apparatus according to claim 1,wherein a scanning region of said charged particle beam is divided intoa plurality of areas and adjustment values of said focus adjustmentmeans adjusted at the individual areas and adjustment values of saidastigmatism adjustment means adjusted at the individual areas are storedin said memory means by making the correspondence with positions of saidareas.
 14. A charged particle beam apparatus according to claim 13,wherein the adjusted values of said focus adjustment means and theadjusted values of said astigmatism adjustment means are stored as afunctional expression of deflection position or deflection angle of saidcharged particle beam.
 15. A charged particle beam apparatus accordingto claim 13 further comprising a detector for detecting a signalgenerated from the specimen under irradiation of said charged particlebeam and display means, wherein said display means has an area fordisplaying a specimen image by using an output of said detector, an areafor displaying adjusted values of said focus adjustment means andadjusted valued of said astigmatism adjustment means and an area fordiagrammatically displaying said divided areas.
 16. A charged particlebeam apparatus according to claim 14 further comprising a detector fordetecting a signal generated from the specimen under irradiation of saidcharged particle beam and display means, wherein said display means hasan area for displaying a specimen image by using an output of saiddetector and an area for displaying adjusted values of said focusadjustment means, adjusted values of said astigmatism adjustment meansand said functional expression.
 17. A charged particle beam apparatuscomprising: a charged particle beam source; a lens system including anobjective lens for focusing a charged particle beam emitted from saidcharged particle beam source on a specimen; deflection control means forscanning said charged particle beam on the specimen; a detector fordetecting a signal generated from the specimen under irradiation of saidcharged particle beam; memory means for storing an output signal fromsaid detector as an image signal; image comparison means for performingimage comparison on the basis of said image signal; decision means fordeciding the presence or absence of a defect of the specimen on thebasis of a result of comparison by said image comparison means; focusadjustment means for adjusting a focal position of said charged particlebeam by controlling said objective lens; astigmatism adjustment meansfor adjusting astigmatism of said charged particle beam; memory meansfor storing the relation among a deflection position or deflection angleof said charged particle beam by said deflection control means, a focusadjustment value by said focus adjustment means and an astigmatismadjustment value by said astigmatism adjustment means; and a controllerfor controlling said deflection control means, focus adjustment meansand astigmatism adjustment means, wherein said controller operates ininterlocked relation to the deflection position or deflection angle ofsaid charged particle beam by said deflection control means to controlsaid focus control means such that said charged particle beam is focusedon said specimen in accordance with the relation stored in said memorymeans and to cause said astigmatism adjustment means to correct saidcharged particle beam for an astigmatic aberration.